®
The MEMS Equipment Company™
 


XACTIX, Inc.
2403 SIDNEY STREET
SUITE 300
PITTSBURGH, PA 15203
USA

TEL: (412) 381-3195
FAX: (412) 381-1136

US Sales:
ussales@xactix.com

International Sales:
intsales@xactix.com

Support:
support@xactix.com

©1998-2009 XACTIX, Inc.
All rights reserved.
Terms of use.

 

 

 

 

 

 

 

 



 

 

 

The XALD Series

 

The XALD Series of etchers allows XACTIX partners to integrate xenon difluoride etching capabilities into their systems. The separate chamber, gas box, electrical box and control computer provides the flexibility for integration into a wide range of system configurations needed to target different applications.

Key Features

  • Reliability: The XALD Series is built to require minimal maintenance.
  • Support: The XALD Series comes with support for integration, process design, and customer service from XACTIX, the leader in xenon difluoride etching.
  • Safety: The XALD series has multiple safety interlocks and ventilation provisions to maximize safety.
  • Flexibility: The separate chamber, gas box, electrical panel and computer provide flexibility for integration.
  • Software Control: Software designed to interface with the host system.

    Last Updated April 31, 2010