Xetch
X3M™ Specifications
Patent
pending
Overview
The
X3M etches multiple substrates held vertically in a wafer boat
or similar carrier. This system is primarily intended for manufacture
of devices requiring a complete removal of exposed sacrificial
silicon or other designs which do not require high uniformity
etching across the wafer.
Key
Features
- Maximum
throughput with minimum equipment cost.
- Unique
design provides uniform flow across chamber for high uniformity
between wafers.
- Built-in
fume hood protects operator during loading and unloading.
- Chamber
door opens with handles outside of processing area to minimize
particle contamination.
- Supports
both pulsed and continuous flow for maximum process flexibility.
- Patented
gas deliverty system for higher etch rates.
System
Geometry
The
Xetch® X3M is delivered in its standard configuration
with two xenon difluoride expansion chambers and the
provision for
the
installation of two xenon difluoride source bottles
(not included with the system).
Wafer Capacity
The
X3M can accomodate wafers up to 150mm in diameter
and can hold up to either 48 100mm wafers or 24 150mm wafers.
Since the system is open load (no automated handling) other
smaller substrates and pieces of wafers and packages can be
placed inside.
Software
Control
The
unit comes ready to use with a friendly software interface
controlled
from a touch screen display. The Xetch® software
includes continuous flow and pulsed etching mode.
Ethernet
Control Upgrade
The
Xetch can be upgraded to be monitored and/or controlled from
a remote computer hooked up through an ethernet network.
Utility
requirements
- 100-120
Volt AC/ 20 Amps for system excluding vacuum pump, which requires
10A
- Nitrogen
lines for process N2, vent N2, and gas box purge N2: 10-20
psi
- Compressed
Dry Air: 70-100 psi
- Fume
exhaust from roughing pump, gas box, and chamber ventilation
shroud
Dimensions
and Weight
- System
Frame: 70cm wide X 60cm deep X 180cm high
- Weight
approximately 600 lbs
Warranty
and installation
- 1-year
parts and labor
- Free
software updates for one year from acceptance.
- Installation
is included in the system price
- Installation
takes 1 day, and 1 further day for operator training is also
included in the system price.
- Final
verification test at the customer’s site
Last
Updated September 11, 2006
