The Xetch e1 Series™

The Xetch e1 TM is a simple, low cost xenon difluoride silicon etch system for universities who do not need all of the features of XACTIX’s X3 Series Xetch® . It is ideal for users who have a limited budget, are part of a smaller group and who are working primarily with small samples and also need to the ability to etch wafers.

Key Features

• Reliability: The Xetch e1 Series is built to require minimal maintenance.
• Safety: The e1 has multiple safety interlocks and ventilation provisions for maximum safety.
• Flexibitlity: The process chamber can accommodate individual die, pieces of wafer, wafers of any size up to 6” or even packaged chips.
• Sophisticated Control: The e1's control software manages recipes, logs data and manages multiple users.
• Cost of Ownership: A small footprint, easy utilities and robust design keep the cost of ownership low.

  Last Updated August 3, 2005

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